3D Glass Solutions produces a number of micro-cavity products for a wide range of customers across multiple industries. Micro-cavities fabricated with APEX® Glass offer several advantages over alternative materials such as legacy glasses, silicon and polymers.  

These advantages include:

  • Precise, micron-scaled, dimensional control for exact volumes
  • Straight sidewalls (<2 degrees) ensures efficient wafer scale production
  • Robust chemical and thermal compatibility
  • No edge chipping, fractures, or breaks; no sub-surface damage
  • Create cavities of any shape or size
  • Create cavities as deep as 800 microns
  • Integrate cavities with adjacent or in-cavity copper filled vias
  • Integrate cavities with sidewall angles of up to 45 degrees
  • Cavities with multiple shapes, sizes and depths can be integrated on the same chip
  • Create micro-cavities for wafer-level packaging of lids for both active and passive components.

Examples of Manufactured Components


End User Applications

Cell phone sensors Wireless timers
Optoelectronics MEMS/MOEMS technologies
Batteries Image sensors
Electronic connectors Mechanical spacers
Ink jet printer heads Lab-on-a-chip

General Micro-cavity Design Rules

New techniques and capabilities are continuously being explored at 3D Glass Solutions, but below are some basic design rules for the production of micro-cavities with and without Through Glass Vias (TGVs).

Process Description Capability
Final Glass Thickness 250 - 1000 microns
Cavity Depth 25 - 800 microns
Cavity Aspect Ratio 5:1 (depth:width)
Minimum Cavity Size 30 microns
Standard Cavity Sidewall Angle Less than 2 degrees
Advanced Cavity Sidewall Angle Up to 45 degrees
TGV Aspect Ratio 7:1 (glass thickness:TGV diameter)
Minimum TGV Spacing from Cavity 100 microns

Do you have a design in mind?  Let us help you.  Please check out our APEX® Glass Resources or contact us directly.